Microfluidic resonators with two parallel channels for independent sample loading and effective density tuning

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This paper reports doubly clamped microchannel embedded resonators with two independent and parallel channels integrated for effective sample density tuning for the first time. With the aid of such a unique design, each fluidic channel can be independently accessed thus different liquid samples can be loaded simultaneously. The proposed fluidic resonators are batch fabricated by depositing silicon nitride, polysilicon, and silicon nitride sequentially on top of a set of 4-inch silicon wafers and sacrificing the middle polysilicon layer with potassium hydroxide (KOH). The sacrificial process defines two parallel channels and releases doubly clamped beam resonators simultaneously. In addition, an off-chip vacuum clamp with optical and fluidic access is custom-made to operate each resonator with enhanced quality factor. The microfluidic resonators mounted on the custom vacuum clamp are thoroughly characterized with a laser Doppler vibrometer and used to measure the effective sample density ranging from 395 to 998 kg/m3.
Publisher
SPRINGERNATURE
Issue Date
2020-10
Language
English
Article Type
Article
Citation

MICRO AND NANO SYSTEMS LETTERS, v.8, no.16, pp.1 - 7

ISSN
2213-9621
DOI
10.1186/s40486-020-00119-8
URI
http://hdl.handle.net/10203/277806
Appears in Collection
ME-Journal Papers(저널논문)
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