Freestanding nanostructures via reactive ion beam angled etching

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Freestanding nanostructures play an important role in optical and mechanical devices for classical and quantum applications. Here, we use reactive ion beam angled etching to fabricate optical resonators in bulk polycrystalline and single crystal diamond. Reported quality factors are approximately 30 000 and 286 000, respectively. The devices show uniformity across 25 mm samples, a significant improvement over comparable techniques yielding freestanding nanostructures.
Publisher
AMER INST PHYSICS
Issue Date
2017-05
Language
English
Article Type
Article
Citation

APL PHOTONICS, v.2, no.5

ISSN
2378-0967
DOI
10.1063/1.4982603
URI
http://hdl.handle.net/10203/277541
Appears in Collection
EE-Journal Papers(저널논문)
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