Anisotropic He-ion irradiation damages in nanocolumnarWthin films

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The effects of He-ion irradiation on the microstructures and the mechanical, thermal properties of sputter-deposited nanocolumnar tungsten thin films have been studied. 200 keV He+ ion irradiation with a fluence of 2x1017 ions/cm2 was performed in the growth direction of the W thin films. Small scale mechanical testing methods, such as nanoindentation and square membrane deflection experiments, were carried out, and the thermal conductivity measurement was performed based on the electrical resistivity measurement and the Wiedemann–Franz law for the unirradiated and irradiated W thin films. It was revealed that the properties in the out-of-plane direction are not changed much, but a significant degradation occurs in the in-plane direction after the He-ion irradiation. The microstructure of the film and the distribution of He-ion induced damages are responsible for the anisotropic property changes by He-ion irradiation.
Publisher
ELSEVIER
Issue Date
2020-11
Language
English
Article Type
Article
Citation

EXTREME MECHANICS LETTERS, v.41, pp.100984

ISSN
2352-4316
DOI
10.1016/j.eml.2020.100984
URI
http://hdl.handle.net/10203/277081
Appears in Collection
ME-Journal Papers(저널논문)
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