HETEROGENEOUSLY INTEGRATED PHOTONIC CIRCUIT AND METHOD FOR MANUFACTURING THE CIRCUIT이종 적으로 통합 된 광 회로 및 회로 제조 방법

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The method for manufacturing the heterojunction circuit according to one embodiment of the present disclosure comprises depositing a first electrode on at least a part of a waveguide, moving a semiconductor comprising a second electrode at a lower end thereof onto the first electrode, and depositing a third electrode on an upper end of the semiconductor, wherein the waveguide and the semiconductor comprise different materials. Additionally, the moving step further comprises generating microbubbles by supplying heat to at least a part of the semiconductor, moving the semiconductor on the first electrode by moving the generated microbubbles, and removing the microbubbles by positioning the semiconductor on the first electrode.
Assignee
KAIST
Country
US (United States)
Application Date
2019-03-27
Application Number
16366534
Registration Date
2020-09-08
Registration Number
10768367
URI
http://hdl.handle.net/10203/276717
Appears in Collection
EE-Patent(특허)
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