Triboelectric nanogenerator for a repairable transistor with self-powered electro-thermal annealing

Abstract

A metal-oxide-semiconductor field-effect transistor (MOSFET), which is an elementary unit of microelectronics, was repaired by self-powered electro-thermal annealing with the aid of a wind-driven triboelectric nanogenerator (TENG). It was thermally cured by Joule heat that originated electrically from the MOSFET itself. The configuration of the self-curable system is composed of a MOSFET with an embedded built-in Joule heater and a wind-driven TENG. This self-curable feature is attractive for the construction of remote wireless sensor networks, is capable of sustainable operation for long-term use, has high immunity against external environmental stress as well as internal operation stress, and can reduce labor during the periodic replacement of power sources.