DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lim, TW | ko |
dc.contributor.author | Park, SH | ko |
dc.contributor.author | Yang, Dong-Yol | ko |
dc.contributor.author | Pham, TA | ko |
dc.contributor.author | Lee, DH | ko |
dc.contributor.author | Kim, DP | ko |
dc.contributor.author | Chang, SI | ko |
dc.contributor.author | Yoon, Jun-Bo | ko |
dc.date.accessioned | 2008-01-15T02:59:47Z | - |
dc.date.available | 2008-01-15T02:59:47Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2006-11 | - |
dc.identifier.citation | MICROELECTRONIC ENGINEERING, v.83, no.11-12, pp.2475 - 2481 | - |
dc.identifier.issn | 0167-9317 | - |
dc.identifier.uri | http://hdl.handle.net/10203/2762 | - |
dc.description.abstract | A sequential micromolding and pyrolysis process is presented for fabricating three-dimensional (313) SiGbased ceramic micropatterns with a submicron scale resolution using preceramic resins, which is a promising technique for diverse applications such as tribological micro-stamps of hot embossing. Firstly, a diffuser lithography process (DLP) and a two-photon polymerization (TPP) process have been employed to create master patterns, which are utilized in the fabrication of molds. In the DLP, various hemispheric-concave master shapes were built readily by exposing UV-light onto a thick positive photoresist film through a diffuser, which randomizes the paths of incident UV-light. Alternatively, the TPP process based on two-photon polymerization was used for the creation of real 3D master patterns with a two-photon sensitive resin mixture. Subsequently, the preceramic polymer micropatterns were fabricated via a micromolding process using polydimethylsiloxane (PDMS) molds replicated from the masters. Finally, the UV-cured preceramic micropatterns were transformed into SiGbased ceramic microstructures when pyrolyzed at 800 degrees C under inert atmosphere. (c) 2006 Elsevier B.V. All rights reserved. | - |
dc.language | English | - |
dc.language.iso | en_US | en |
dc.publisher | ELSEVIER SCIENCE BV | - |
dc.subject | LITHOGRAPHY | - |
dc.subject | MICROSTRUCTURES | - |
dc.subject | COMPOSITES | - |
dc.title | Fabrication of three-dimensional SiC-based ceramic micropatterns using a sequential micromolding-and-pyrolysis process | - |
dc.type | Article | - |
dc.identifier.wosid | 000243315700085 | - |
dc.identifier.scopusid | 2-s2.0-33751245302 | - |
dc.type.rims | ART | - |
dc.citation.volume | 83 | - |
dc.citation.issue | 11-12 | - |
dc.citation.beginningpage | 2475 | - |
dc.citation.endingpage | 2481 | - |
dc.citation.publicationname | MICROELECTRONIC ENGINEERING | - |
dc.identifier.doi | 10.1016/j.mee.2006.05.010 | - |
dc.embargo.liftdate | 9999-12-31 | - |
dc.embargo.terms | 9999-12-31 | - |
dc.contributor.localauthor | Yang, Dong-Yol | - |
dc.contributor.localauthor | Yoon, Jun-Bo | - |
dc.contributor.nonIdAuthor | Lim, TW | - |
dc.contributor.nonIdAuthor | Park, SH | - |
dc.contributor.nonIdAuthor | Pham, TA | - |
dc.contributor.nonIdAuthor | Lee, DH | - |
dc.contributor.nonIdAuthor | Kim, DP | - |
dc.contributor.nonIdAuthor | Chang, SI | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | 3D ceramic microstructures | - |
dc.subject.keywordAuthor | micromolding | - |
dc.subject.keywordAuthor | diffuser lithography | - |
dc.subject.keywordAuthor | two-photon process | - |
dc.subject.keywordPlus | LITHOGRAPHY | - |
dc.subject.keywordPlus | MICROSTRUCTURES | - |
dc.subject.keywordPlus | COMPOSITES | - |
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