Method for coating thin film in rolling manner and apparatus for coating thin film by using the same회전 방식을 이용한 박막 코팅 방법 및 박막 코팅 장치

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A method for coating a thin film in a rolling manner and a thin film coating apparatus are provided. The method includes: floating a thin film material on a liquefied material; rolling a cylindrical substrate after contacting the cylindrical substrate with the thin film material; and coating the thin film material on a surface of the cylindrical substrate by using an attraction force between the surface of the cylindrical substrate and the thin film material.
Assignee
KAIST
Country
US (United States)
Application Date
2017-04-06
Application Number
15480863
Registration Date
2020-03-10
Registration Number
10583452
URI
http://hdl.handle.net/10203/275223
Appears in Collection
ME-Patent(특허)
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