Simultaneous 3-D Surface Profiling of Multiple Targets by Repetition Rate Scanning of a Single Femtosecond Laser

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We present an integrated scheme of 3-D surface profile measurements made at multiple sites concurrently by employing only a single fiber femtosecond laser as the common light source of low coherence scanning interferometry. This versatile use of an ultrashort mode-locked laser is enabled by linear scanning control of the pulse repetition rate on the source site, while diverse forms of unequal-path, non-symmetric measurements are taken with nanometer precision for different targets simply by delivering f(r)-scanned pulses through a fiber network. This proposed scheme has no restriction on the number of interferometer sites being integrated concurrently, allowing more diverse industrial applications of ultrashort lasers despite increased system cost and complexity.
Publisher
KOREAN SOC PRECISION ENG
Issue Date
2020-02
Language
English
Article Type
Article
Citation

INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, v.21, no.2, pp.211 - 217

ISSN
2234-7593
DOI
10.1007/s12541-019-00246-2
URI
http://hdl.handle.net/10203/274208
Appears in Collection
ME-Journal Papers(저널논문)
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