DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, Sang Jae | ko |
dc.contributor.author | Kim, Min Ju | ko |
dc.contributor.author | Lee, Tae Yoon | ko |
dc.contributor.author | Lee, Tae In | ko |
dc.contributor.author | Bong, Jae Hoon | ko |
dc.contributor.author | Shin, Sung Won | ko |
dc.contributor.author | Kim, Seongho | ko |
dc.contributor.author | Hwang, Wan Sik | ko |
dc.contributor.author | Cho, Byung-Jin | ko |
dc.date.accessioned | 2020-01-20T05:20:10Z | - |
dc.date.available | 2020-01-20T05:20:10Z | - |
dc.date.created | 2019-11-21 | - |
dc.date.created | 2019-11-21 | - |
dc.date.issued | 2019-12 | - |
dc.identifier.citation | AIP ADVANCES, v.9, no.12 | - |
dc.identifier.issn | 2158-3226 | - |
dc.identifier.uri | http://hdl.handle.net/10203/271571 | - |
dc.description.abstract | Ferroelectric HfxZryOz (HZO) with an average polarization switching window of 32 mu C/cm(2) was demonstrated on a Si substrate with a ZrO2 interfacial layer (IL). It is suggested that the ZrO2 IL below HZO crystallizes in the form of an o-phase prior to HZO crystallization, during rapid thermal annealing, thereby promoting the vertical growth of an o-phase HZO layer. HZO with the ZrO2 IL consists mainly of an o-phase that exhibits an in-plane tensile stress of 2.68 GPa, resulting in superior ferroelectric characteristics. This technology has the potential to expedite the realization of ferroelectric Hf-based dielectrics in advanced memory and logic technology. | - |
dc.language | English | - |
dc.publisher | AMER INST PHYSICS | - |
dc.title | Effect of ZrO2 interfacial layer on forming ferroelectric HfxZryOz on Si substrate | - |
dc.type | Article | - |
dc.identifier.wosid | 000505572700003 | - |
dc.identifier.scopusid | 2-s2.0-85076808994 | - |
dc.type.rims | ART | - |
dc.citation.volume | 9 | - |
dc.citation.issue | 12 | - |
dc.citation.publicationname | AIP ADVANCES | - |
dc.identifier.doi | 10.1063/1.5124402 | - |
dc.contributor.localauthor | Cho, Byung-Jin | - |
dc.contributor.nonIdAuthor | Lee, Sang Jae | - |
dc.contributor.nonIdAuthor | Lee, Tae Yoon | - |
dc.contributor.nonIdAuthor | Shin, Sung Won | - |
dc.contributor.nonIdAuthor | Hwang, Wan Sik | - |
dc.description.isOpenAccess | Y | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | THIN-FILMS | - |
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