Effect of ZrO2 interfacial layer on forming ferroelectric HfxZryOz on Si substrate

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dc.contributor.authorLee, Sang Jaeko
dc.contributor.authorKim, Min Juko
dc.contributor.authorLee, Tae Yoonko
dc.contributor.authorLee, Tae Inko
dc.contributor.authorBong, Jae Hoonko
dc.contributor.authorShin, Sung Wonko
dc.contributor.authorKim, Seonghoko
dc.contributor.authorHwang, Wan Sikko
dc.contributor.authorCho, Byung-Jinko
dc.date.accessioned2020-01-20T05:20:10Z-
dc.date.available2020-01-20T05:20:10Z-
dc.date.created2019-11-21-
dc.date.created2019-11-21-
dc.date.issued2019-12-
dc.identifier.citationAIP ADVANCES, v.9, no.12-
dc.identifier.issn2158-3226-
dc.identifier.urihttp://hdl.handle.net/10203/271571-
dc.description.abstractFerroelectric HfxZryOz (HZO) with an average polarization switching window of 32 mu C/cm(2) was demonstrated on a Si substrate with a ZrO2 interfacial layer (IL). It is suggested that the ZrO2 IL below HZO crystallizes in the form of an o-phase prior to HZO crystallization, during rapid thermal annealing, thereby promoting the vertical growth of an o-phase HZO layer. HZO with the ZrO2 IL consists mainly of an o-phase that exhibits an in-plane tensile stress of 2.68 GPa, resulting in superior ferroelectric characteristics. This technology has the potential to expedite the realization of ferroelectric Hf-based dielectrics in advanced memory and logic technology.-
dc.languageEnglish-
dc.publisherAMER INST PHYSICS-
dc.titleEffect of ZrO2 interfacial layer on forming ferroelectric HfxZryOz on Si substrate-
dc.typeArticle-
dc.identifier.wosid000505572700003-
dc.identifier.scopusid2-s2.0-85076808994-
dc.type.rimsART-
dc.citation.volume9-
dc.citation.issue12-
dc.citation.publicationnameAIP ADVANCES-
dc.identifier.doi10.1063/1.5124402-
dc.contributor.localauthorCho, Byung-Jin-
dc.contributor.nonIdAuthorLee, Sang Jae-
dc.contributor.nonIdAuthorLee, Tae Yoon-
dc.contributor.nonIdAuthorShin, Sung Won-
dc.contributor.nonIdAuthorHwang, Wan Sik-
dc.description.isOpenAccessY-
dc.type.journalArticleArticle-
dc.subject.keywordPlusTHIN-FILMS-
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