Anodic Aluminum Oxide-Based IR Emitter for High-Speed Infrared Scene Projector

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Infrared scene projector (IRSP) is a tool for evaluating the performance of infrared (IR) sensors by generating and projecting virtual IR images. Developing IRSPs with a high frame rate is necessary to evaluate high-speed IR sensors. To develop IRSPs with high frame rates, porous anodic aluminum oxide (AAO) with high thermal conductivity is proposed as a constituent material of IR emitters, which emit infrared rays in IRSPs. Through structure design and fabrication, an AAO-based IR emitter having a suspended structure with a gap of $1\mu \text{m}$ from the substrate was fabricated. The operating speed was obtained by confirming the change in the temperature, which was calculated by measuring the change in resistance after applying the step-function voltage. The operating speed of the AAO-based IR emitter was found to increase with decrease in the leg length of the device. The frame rate of the device with a $5\mu \text{m}$ leg length was found to be 155.3 Hz, twice as fast as the conventional silicon nitride (Si3N4)-based emitters with the same leg length and pitch. Consequently, it is possible to develop the high-speed IRSPs with the application of AAO for emitter. [2019-0191]
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Issue Date
2019-12
Language
English
Article Type
Article
Citation

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.28, no.6, pp.1032 - 1038

ISSN
1057-7157
DOI
10.1109/JMEMS.2019.2943999
URI
http://hdl.handle.net/10203/270807
Appears in Collection
EE-Journal Papers(저널논문)
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