A 2.92-mu W Capacitance-to-Digital Converter With Differential Bondwire Accelerometer, On-Chip Air Pressure, and Humidity Sensor in 0.18-mu m CMOS

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This paper presents a sensor front end for air pressure sensor, relative humidity (RH) sensor, and accelerometer in a standard CMOS process, equipped with a wide input range high-resolution capacitance-to-digital converter (CDC). For air pressure and RH, interdigitated top metals in air and polyimide are exploited, respectively, which exhibit the change in dielectric constant. For acceleration, separation among three bondwires is exploited. These sensing transducers induce capacitance change that is quantized by a CDC based on a dual-quantization architecture that employs a single-bit first-order Delta Sigma modulator and a 7-bit SAR analog-to-digital converter (ADC). Implemented in 0.18-mu m CMOS, the air pressure sensor, RH sensor, and accelerometer achieve a noise floor of 0.14 psi/root Hz, 0.001 %RH/root Hz, and 4.6 mg/root Hz, respectively. The CDC achieves a resolution of 864 aF (minimum resolution of 116 aF) when the sensing capacitance is 10 pF and consumes 3 mu W from 1.1-V supply.
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Issue Date
2019-10
Language
English
Article Type
Article
Citation

IEEE JOURNAL OF SOLID-STATE CIRCUITS, v.54, no.10, pp.2845 - 2856

ISSN
0018-9200
DOI
10.1109/JSSC.2019.2930140
URI
http://hdl.handle.net/10203/268105
Appears in Collection
EE-Journal Papers(저널논문)
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