Multiscale Fluidic Channels via Internal Oxidation and Oxide Etching of Self-Assembled Silicon-on-Nothing Structures

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dc.contributor.authorJe, Jinsolko
dc.contributor.authorSong, Jungkiko
dc.contributor.authorLee, Bong Jaeko
dc.contributor.authorLee, Jungchulko
dc.date.accessioned2019-10-31T08:20:23Z-
dc.date.available2019-10-31T08:20:23Z-
dc.date.created2019-10-31-
dc.date.created2019-10-31-
dc.date.issued2019-10-
dc.identifier.citationJOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.28, no.5, pp.865 - 868-
dc.identifier.issn1057-7157-
dc.identifier.urihttp://hdl.handle.net/10203/268098-
dc.description.abstractThis paper reports a novel fabrication method for multiscale fluidic channels ranging from sub-20 nm to a few mu m in their hydraulic diameters, D-h, exhibiting height-to-width ratio [or aspect ratio (AR)] close to unity only relying on internal oxidation and oxide etching of self-assembled silicon-on-nothing (SON) structures. We find that internal oxidation occurs uniformly along the longitudinal direction of the SON microchannels and time-controlled thermal oxidation can offer nanochannels with the minimum D-h of similar to 10 nm. Third, the enlarged circular microchannels with the maximum D-h of similar to 4500 nm are achieved through wet etching of internal silicon dioxide. The smallest nanochannel demonstrated exhibits the length-to-diameter ratio of similar to 60 000 and the ratio of the largest microchannel cross section to the smallest nanochannel cross section is similar to 200 000.-
dc.languageEnglish-
dc.publisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC-
dc.titleMultiscale Fluidic Channels via Internal Oxidation and Oxide Etching of Self-Assembled Silicon-on-Nothing Structures-
dc.typeArticle-
dc.identifier.wosid000489837100016-
dc.identifier.scopusid2-s2.0-85077733115-
dc.type.rimsART-
dc.citation.volume28-
dc.citation.issue5-
dc.citation.beginningpage865-
dc.citation.endingpage868-
dc.citation.publicationnameJOURNAL OF MICROELECTROMECHANICAL SYSTEMS-
dc.identifier.doi10.1109/JMEMS.2019.2926378-
dc.contributor.localauthorLee, Bong Jae-
dc.contributor.localauthorLee, Jungchul-
dc.contributor.nonIdAuthorJe, Jinsol-
dc.contributor.nonIdAuthorSong, Jungki-
dc.description.isOpenAccessN-
dc.type.journalArticleArticle-
dc.subject.keywordAuthorMultiscale channel-
dc.subject.keywordAuthormicrochannel-
dc.subject.keywordAuthornanochannel-
dc.subject.keywordAuthorsilicon-on-nothing (SON)-
dc.subject.keywordPlus2-DIMENSIONAL THERMAL-OXIDATION-
dc.subject.keywordPlusNANOFABRICATION-
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ME-Journal Papers(저널논문)
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