DSpace at KOASAS
College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

In-situ single wavelength ellipsometer for a vacuum chamber

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 803
  • Download : 870
Export
Chegal, Won / Ye, SH / Lee, YW / Kim, Soohyunresearcher / Kwak, Yoon Keunresearcher
Publisher
SPIE
Issue Date
2001-06
Language
English
Description

Copyright 2001 Society of Photo-Optical Instrumentation Engineers.

Citation

International Society for Optical Engineering (SPIE), pp.15 - 18

URI
http://hdl.handle.net/10203/2679
Appears in Collection
ME-Conference Papers(학술회의논문)
Files in This Item

Display Full Item Record

qr_code

  • mendeley

    citeulike

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.


rss_1.0 rss_2.0 atom_1.0