Investigation of Characteristics in Vertical Si Pillar-type FET with Asymmetric Source and Drain Resistances = 비대칭 소스 및 드레인 저항을 갖는 수직 실리콘 필러 형 트랜지스터의 특성 연구

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In this thesis, the transfer characteristics and low-frequency noise (LFN) as well as single transistor latch (STL) were investigated in a vertical Si pillar-type FET. The source resistance ($R_S$) and the drain resistance are inevitably different by reason of ion-implantation and metal contact process due to a vertical configuration. A forward mode (FM) and reverse mode (RM) of voltage sweep were employed by exchanging the source and the drain electrode. The drain current ($I_D$) was higher in the RM than the FM, due to relatively small $R_S$. In case of LFN, the effect of correlated mobility (CMF) was higher in the RM as well as the power spectral density of resistance fluctuation ($S_{RSD}$) was lower than that in the FM. In addition, $R_S$ was very well correlated with the $S_{RSD}$, which indicated that RS severely influence on the $S_{RSD}$. It is imperative to minimize the $R_S$ to suppress $S_{RSD}$. The STL and associated hysteresis was observed only in the RM. On the other hand, hysteresis was not observed in the FM despite STL occurred. The doping concentration at the source node should be high enough so that the generated holes do not escape. In addition, the window of latch voltage ($ΔV_L$) was affected by the series resistance.
Advisors
Choi, Yang Kyuresearcher최양규researcher
Description
한국과학기술원 :전기및전자공학부,
Publisher
한국과학기술원
Issue Date
2018
Identifier
325007
Language
eng
Description

학위논문(석사) - 한국과학기술원 : 전기및전자공학부, 2018.8,[ii. 33 p. :]

Keywords

Low-frequency noise (LFN)▼aforward mode (FM)▼areverse mode (RM)▼apower spectral density of resistance fluctuation $(S_{RSD})$▼asource and drain resistance ($R_S$ and $R_D$)▼asingle transistor latch (STL)▼alatch-down voltage ($V_{LD}$)▼avertcial si pillar-type FET; 저주파 잡음 (LFN)▼a순방향 모드 (FM)▼a역방향 모드 (RM)▼a저항 변동의 전력 스펙트럼 밀도 $(S_{RSD})$▼a소스와 드레인 저항 ($R_S$ 및 $R_D$)▼a단일트랜지스터 래치 (STL)▼a래치 다운 전압 ($V_{LD}$)▼a수직 실리콘 필러 형 트랜지스터

URI
http://hdl.handle.net/10203/266962
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=828577&flag=dissertation
Appears in Collection
EE-Theses_Master(석사논문)
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