Design and fabrication of MEMS-based device for In-situ tensile experiments at nanoscale

Abstract

Analysis of fracture behavior in tensile and tensile tests of nanoscale was one of the most important factors in the success of the tensile experiment. This paper introduces results specific to tensile testing due to the ability to control the fracture behavior of nanoscale tensile device made of various technologies including micro-electro-mechanical systems (MEMS) and inventive microstructures. The increased weight that were not possible with conventional tensile testing equipment could solved with structural originality and the use of two DRIE technologies and the creative arrangement of the process sequence. Significant benefits were gained in observing fracture behavior by significantly increasing the weight of the structure and increasing its stability. The experimental results were confirmed through dynamic simulation and analysis of the tensile testing of the process results.