Design and fabrication of MEMS-based device for In-situ tensile experiments at nanoscale = 나노단위 실시간 인장 실험을 위한 멤스 기반 장치의 디자인 및 제작

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Analysis of fracture behavior in tensile and tensile tests of nanoscale was one of the most important factors in the success of the tensile experiment. This paper introduces results specific to tensile testing due to the ability to control the fracture behavior of nanoscale tensile device made of various technologies including micro-electro-mechanical systems (MEMS) and inventive microstructures. The increased weight that were not possible with conventional tensile testing equipment could solved with structural originality and the use of two DRIE technologies and the creative arrangement of the process sequence. Significant benefits were gained in observing fracture behavior by significantly increasing the weight of the structure and increasing its stability. The experimental results were confirmed through dynamic simulation and analysis of the tensile testing of the process results.
Advisors
Jang, Dongchanresearcher장동찬researcher
Description
한국과학기술원 :원자력및양자공학과,
Publisher
한국과학기술원
Issue Date
2018
Identifier
325007
Language
eng
Description

학위논문(석사) - 한국과학기술원 : 원자력및양자공학과, 2018.8,[v, 44 p. :]

Keywords

MEMS▼ananoscale▼atensile test device▼amass▼apico-indenter; MEMS▼a나노단위▼a인장 테스트 장비▼a무게▼a피코인덴터

URI
http://hdl.handle.net/10203/266570
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=828549&flag=dissertation
Appears in Collection
NE-Theses_Master(석사논문)
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