Wafer distribution system for a clean room using a novel magnetic suspension technique

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A linear transport system, which is capable of reducing the weight of a moving carrier by separating power-supplying devices, is developed by using a new magnetic levitation technique, This system is designed to distribute a wafer between semiconductor fabrication process modules in clean rooms, because it can eliminate particles and oil contamination that normally exist in conventional transporter systems due to rubbing of mechanical components. The transport system consists of a wafer carrier, two Levitation tracks, tyro stabilization tracks, and a propelling system. Levitation is achieved by using opposing forces produced between electromagnet tracks and permanent magnets, Stabilization is achieved by using a simple feedback control, The continuous propelling force is obtained by sending specific current patterns to the propulsion coils, The dynamic model of the transport system is presented, and it is verified by experiment, The system performance is experimentally investigated.
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Issue Date
1998-03
Language
English
Article Type
Article
Keywords

PARTICLE GENERATION

Citation

IEEE-ASME TRANSACTIONS ON MECHATRONICS, v.3, no.1, pp.73 - 78

ISSN
1083-4435
URI
http://hdl.handle.net/10203/2658
Appears in Collection
ME-Journal Papers(저널논문)
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