학위논문(박사) - 한국과학기술원 : 전기및전자공학부, 2018.2,[vii, 75 p. :]
Atomic layer deposition▼achemical vapor deposition▼atungsten▼aeffective work function▼agate electrode▼alogic device▼amemory device▼atitanium carbide▼atitanium nitride; 게이트 전극▼a원자층 증착▼a일함수▼a질화티탄▼a탄화티탄▼a화학기상 증착▼a텅스텐▼a로직소자▼a메모리소자
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