#### Synthesis and self-assembly of block copolymers with precisely controlled flory-huggins interaction parameter = 정밀하게 조절된 Flory-Huggins 상호작용 인자를 가지는 블록공중합체의 합성과 자기 조립 연구

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Directed self-assembly (DSA) of block copolymers (BCP) has garnered much attention due to its well-defined periodic nanostructures of spherical, cylindrical, and lamellar morphologies with a period of 5 - 50 nm. In particular, DSA can provide multiple advantages of high resolution, scalability, and cost-effectiveness, thus it considered as a practical approach to manufacture various semiconductor devices and next-generation information storage media. However, there exist only few BCPs with a high Flory-Huggins interaction parameter ($\chi$) can provide sub-10 nm resolution, high pattern quality, and sufficient etch selectivity. The high-$\chi$ BCPs can generate the high resolution patterns with a low line edge roughness, however, the slow chain diffusion of BCPs results in a prolonged assembly time. Therefore, the $\chi$ of BCP is a main factor to determine the characteristics of self-assembly. To generate well-aligned nano structures within 10 nm dimeter, we synthesize BCPs with a precisely controlled $\chi$ value by diverse organic chemistry and polymer synthesis methods. The BCPs consist of poly(dimethylsiloxane) as one block and poly(2-vinylpyridne), poly(4-vinylpyridne) and poly(isoprene) as other blocks. The $\chi$ value of synthesized BCPs is calculated by small angle X-ray scattering (SAXS) measurement and Libler’s mean field theory. Furthermore, we study that the effect of $\chi$ value on self-assembled pattern quality via the synthesized BCPs. We expect that these diverse BCPs would enable to open the possibility of DSA for future applications.
Jung, Yeon Sikresearcher정연식researcher
Description
한국과학기술원 :신소재공학과,
Publisher
한국과학기술원
Issue Date
2017
Identifier
325007
Language
eng
Description

학위논문(박사) - 한국과학기술원 : 신소재공학과, 2017.2,[vii, 168 p. :]

Keywords

Block copolymers▼aFlory-Huggins interaction parameter▼adirected self-assembly▼apoly(dimethylsiloxane)▼apoly(2-vinylpyridine)▼apoly(4-vinylpyridine)▼apoly(isoprene); 블록공중합체▼aFlory-Huggins 상호작용 인자▼a직접 자기 조립▼a폴리(다이메틸실록세인)▼a폴리(2-비닐피리딘)▼a폴리(4-비닐피리딘)▼a폴리 (이소프렌)

URI
http://hdl.handle.net/10203/265026