DC Field | Value | Language |
---|---|---|
dc.contributor.author | Cho, Dae-Hyung | ko |
dc.contributor.author | Lee, Woo-Jung | ko |
dc.contributor.author | Shin, Byungha | ko |
dc.contributor.author | Chung, Yong-Duck | ko |
dc.date.accessioned | 2019-07-11T01:50:17Z | - |
dc.date.available | 2019-07-11T01:50:17Z | - |
dc.date.created | 2019-07-09 | - |
dc.date.created | 2019-07-09 | - |
dc.date.issued | 2019-08 | - |
dc.identifier.citation | APPLIED SURFACE SCIENCE, v.486, pp.555 - 560 | - |
dc.identifier.issn | 0169-4332 | - |
dc.identifier.uri | http://hdl.handle.net/10203/263220 | - |
dc.description.abstract | Zinc oxysulfide (Zn(O,S)) is widely used for photovoltaic and optoelectronic devices because its electronic properties are tunable with adjustments to the S-to-O composition ratio. Zn(O,S) thin films used in devices are typically assumed to have constant S-to-O composition ratios across their thicknesses. However, S-to-O composition ratio gradients, and thus electronic property variations along the vertical direction, can be naturally induced. Such gradients can enhance device performance. In this work, we analyzed the S-to-O composition ratios along the thickness directions of Zn(O,S) thin films deposited at a fixed O-2 gas flux. Natural O enrichment was observed near the bottom of the film, attributed to the highly reactive nature of the sputtering process. By increasing O-2 gas flux during sputtering, more compositionally uniform thin films were obtained. We suggest that non-uniform phase distribution in the depth direction could be considered for achieving desired composition ratios when depositing Zn(O,S) thin films using reactive sputtering. | - |
dc.language | English | - |
dc.publisher | ELSEVIER SCIENCE BV | - |
dc.title | Analysis of vertical phase distribution in reactively sputtered zinc oxysulfide thin films | - |
dc.type | Article | - |
dc.identifier.wosid | 000471748100062 | - |
dc.identifier.scopusid | 2-s2.0-85066053533 | - |
dc.type.rims | ART | - |
dc.citation.volume | 486 | - |
dc.citation.beginningpage | 555 | - |
dc.citation.endingpage | 560 | - |
dc.citation.publicationname | APPLIED SURFACE SCIENCE | - |
dc.identifier.doi | 10.1016/j.apsusc.2019.04.200 | - |
dc.contributor.localauthor | Shin, Byungha | - |
dc.contributor.nonIdAuthor | Lee, Woo-Jung | - |
dc.contributor.nonIdAuthor | Chung, Yong-Duck | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | Thin film | - |
dc.subject.keywordAuthor | Zn(O,S) | - |
dc.subject.keywordAuthor | Sputter deposition | - |
dc.subject.keywordAuthor | Phase composition | - |
dc.subject.keywordPlus | SOLAR-CELLS | - |
dc.subject.keywordPlus | PHOTOVOLTAIC PERFORMANCE | - |
dc.subject.keywordPlus | ZNO | - |
dc.subject.keywordPlus | CU(IN,GA)SE-2 | - |
dc.subject.keywordPlus | ZN(O,S) | - |
dc.subject.keywordPlus | TEMPERATURE | - |
dc.subject.keywordPlus | JUNCTION | - |
dc.subject.keywordPlus | LAYERS | - |
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