Analysis of vertical phase distribution in reactively sputtered zinc oxysulfide thin films

Cited 2 time in webofscience Cited 0 time in scopus
  • Hit : 103
  • Download : 0
DC FieldValueLanguage
dc.contributor.authorCho, Dae-Hyungko
dc.contributor.authorLee, Woo-Jungko
dc.contributor.authorShin, Byunghako
dc.contributor.authorChung, Yong-Duckko
dc.date.accessioned2019-07-11T01:50:17Z-
dc.date.available2019-07-11T01:50:17Z-
dc.date.created2019-07-09-
dc.date.created2019-07-09-
dc.date.issued2019-08-
dc.identifier.citationAPPLIED SURFACE SCIENCE, v.486, pp.555 - 560-
dc.identifier.issn0169-4332-
dc.identifier.urihttp://hdl.handle.net/10203/263220-
dc.description.abstractZinc oxysulfide (Zn(O,S)) is widely used for photovoltaic and optoelectronic devices because its electronic properties are tunable with adjustments to the S-to-O composition ratio. Zn(O,S) thin films used in devices are typically assumed to have constant S-to-O composition ratios across their thicknesses. However, S-to-O composition ratio gradients, and thus electronic property variations along the vertical direction, can be naturally induced. Such gradients can enhance device performance. In this work, we analyzed the S-to-O composition ratios along the thickness directions of Zn(O,S) thin films deposited at a fixed O-2 gas flux. Natural O enrichment was observed near the bottom of the film, attributed to the highly reactive nature of the sputtering process. By increasing O-2 gas flux during sputtering, more compositionally uniform thin films were obtained. We suggest that non-uniform phase distribution in the depth direction could be considered for achieving desired composition ratios when depositing Zn(O,S) thin films using reactive sputtering.-
dc.languageEnglish-
dc.publisherELSEVIER SCIENCE BV-
dc.titleAnalysis of vertical phase distribution in reactively sputtered zinc oxysulfide thin films-
dc.typeArticle-
dc.identifier.wosid000471748100062-
dc.identifier.scopusid2-s2.0-85066053533-
dc.type.rimsART-
dc.citation.volume486-
dc.citation.beginningpage555-
dc.citation.endingpage560-
dc.citation.publicationnameAPPLIED SURFACE SCIENCE-
dc.identifier.doi10.1016/j.apsusc.2019.04.200-
dc.contributor.localauthorShin, Byungha-
dc.contributor.nonIdAuthorLee, Woo-Jung-
dc.contributor.nonIdAuthorChung, Yong-Duck-
dc.description.isOpenAccessN-
dc.type.journalArticleArticle-
dc.subject.keywordAuthorThin film-
dc.subject.keywordAuthorZn(O,S)-
dc.subject.keywordAuthorSputter deposition-
dc.subject.keywordAuthorPhase composition-
dc.subject.keywordPlusSOLAR-CELLS-
dc.subject.keywordPlusPHOTOVOLTAIC PERFORMANCE-
dc.subject.keywordPlusZNO-
dc.subject.keywordPlusCU(IN,GA)SE-2-
dc.subject.keywordPlusZN(O,S)-
dc.subject.keywordPlusTEMPERATURE-
dc.subject.keywordPlusJUNCTION-
dc.subject.keywordPlusLAYERS-
Appears in Collection
MS-Journal Papers(저널논문)
Files in This Item
There are no files associated with this item.
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡ Click to see webofscience_button
⊙ Cited 2 items in WoS Click to see citing articles in records_button

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0