DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, Keon Jae | ko |
dc.contributor.author | Byun, Myung Hwan | ko |
dc.contributor.author | Park, Kwi Il | ko |
dc.contributor.author | Hwang, Geon Tae | ko |
dc.contributor.author | Chung, Chang Kyu | ko |
dc.date.accessioned | 2019-04-30T04:52:23Z | - |
dc.date.available | 2019-04-30T04:52:23Z | - |
dc.date.issued | 2019-01-01 | - |
dc.identifier.uri | http://hdl.handle.net/10203/261653 | - |
dc.description.abstract | Provided is a method for separating a nanogenerator, which includes laminating a buffer layer on a sacrificial substrate, making a nanogenerator on the buffer layer, laminating a metal layer on the nanogenerator and separating the nanogenerator from the buffer layer. Here, a nanogenerator is separated by using a stress difference between the sacrificial substrate and the metal layer, instead of an existing method in which a nanogenerator is separated from the sacrificial substrate by means of wet etching or the like. In particular, according to a difference between a tensile stress at the metal layer such as nickel and a compressive stress at the lower silicon substrate, the nanogenerator is intactly separated from the silicon oxide layer serving as a buffer layer. Therefore, the nanogenerator may be separated from the sacrificial substrate in a mechanical way, which is safer and more economic in comparison to an existing chemical separation method using an etching solution. Further, it is also possible to avoid a damage of the nanogenerator caused by an etching solution. | - |
dc.title | Method for separating nanogenerator and method for manufacturing nanogenerator using the same | - |
dc.title.alternative | 동일한 것을 사용하는 나노폭탄을 분리시키기 위한 방법과 나노폭탄을 제조하기 위한 방법 | - |
dc.type | Patent | - |
dc.type.rims | PAT | - |
dc.contributor.localauthor | Lee, Keon Jae | - |
dc.contributor.nonIdAuthor | Byun, Myung Hwan | - |
dc.contributor.nonIdAuthor | Park, Kwi Il | - |
dc.contributor.nonIdAuthor | Hwang, Geon Tae | - |
dc.contributor.nonIdAuthor | Chung, Chang Kyu | - |
dc.contributor.assignee | KAIST | - |
dc.identifier.iprsType | 특허 | - |
dc.identifier.patentApplicationNumber | 14538154 | - |
dc.identifier.patentRegistrationNumber | 10166400 | - |
dc.date.application | 2014-11-11 | - |
dc.date.registration | 2019-01-01 | - |
dc.publisher.country | US | - |
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