High efficiency hollow cathode and cathode system applying same고효율 할로우 음극과 이를 적용되는 음극 시스템

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dc.contributor.authorChoe, Wonhoko
dc.contributor.authorLim, Youbongko
dc.contributor.authorKim, Holakko
dc.contributor.authorPark, Jooyoungko
dc.contributor.authorSeon, Jonghoko
dc.date.accessioned2019-04-15T15:58:07Z-
dc.date.available2019-04-15T15:58:07Z-
dc.date.issued2018-07-24-
dc.identifier.urihttp://hdl.handle.net/10203/255506-
dc.description.abstractThe present invention relates to a high efficiency hollow cathode and a cathode system applying the same, and comprises: a tube comprising at least two refractory metal parts; a gas providing unit and a gas outlet which are respectively formed at the distal ends of the tube; and an insert mounted inside the tube. According to the present invention, since the present invention constitutes a hollow cathode using more than two substances, the present invention can not only enhance thermal stability, lifespan and efficiency, but also can reduce costs accordingly.-
dc.titleHigh efficiency hollow cathode and cathode system applying same-
dc.title.alternative고효율 할로우 음극과 이를 적용되는 음극 시스템-
dc.typePatent-
dc.type.rimsPAT-
dc.contributor.localauthorChoe, Wonho-
dc.contributor.nonIdAuthorLim, Youbong-
dc.contributor.nonIdAuthorKim, Holak-
dc.contributor.nonIdAuthorPark, Jooyoung-
dc.contributor.nonIdAuthorSeon, Jongho-
dc.contributor.assigneeKAIST-
dc.identifier.iprsType특허-
dc.identifier.patentApplicationNumber15121502-
dc.identifier.patentRegistrationNumber10,032,594-
dc.date.application2015-02-23-
dc.date.registration2018-07-24-
dc.publisher.countryUS-
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