High efficiency hollow cathode and cathode system applying same고효율 할로우 음극과 이를 적용되는 음극 시스템

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The present invention relates to a high efficiency hollow cathode and a cathode system applying the same, and comprises: a tube comprising at least two refractory metal parts; a gas providing unit and a gas outlet which are respectively formed at the distal ends of the tube; and an insert mounted inside the tube. According to the present invention, since the present invention constitutes a hollow cathode using more than two substances, the present invention can not only enhance thermal stability, lifespan and efficiency, but also can reduce costs accordingly.
Assignee
KAIST
Country
US (United States)
Issue Date
2018-07-24
Application Date
2015-02-23
Application Number
15121502
Registration Date
2018-07-24
Registration Number
10,032,594
URI
http://hdl.handle.net/10203/255506
Appears in Collection
NE-Patent(특허)
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