정전 구동 스위치Electrostatic Switch

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Assignee
KAIST
Country
KO (South Korea)
Issue Date
2016-12-28
Application Date
2015-01-15
Application Number
10-2015-0007398
Registration Date
2016-12-28
Registration Number
10-1692294
URI
http://hdl.handle.net/10203/254688
Appears in Collection
EE-Patent(특허)
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