이면 조사형 실리콘 광전자 증배센서 및 그 제조방법Backside illumination-typed silicon photomultiplier and method of fabricating the same
- Assignee
- KAIST
- Country
- KO (South Korea)
- Issue Date
- 2017-07-21
- Application Date
- 2015-12-22
- Application Number
- 10-2015-0184026
- Registration Date
- 2017-07-21
- Registration Number
- 10-1762430-0000
- Appears in Collection
- NE-Patent(특허)
- Files in This Item
- There are no files associated with this item.
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