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Results 1-1 of 1 (Search time: 0.004 seconds).

NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
Parallelizability of helicon and inductively coupled plasma sources for large-area processing = 대면적 공정을 위한 헬리콘과 유도결합 플라즈마 소스의 평행화 연구link

An, Sang-Hyuk; 안상혁; Chang, Hong-Young; 장홍영, 한국과학기술원, 2011

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