Formation and Characterization of Various ZnO/SiO2-Stacked Layers for Flexible Micro-Energy Harvesting Devices

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dc.contributor.authorYoon, Chongseiko
dc.contributor.authorJeon, Builko
dc.contributor.authorYoon, Giwanko
dc.date.accessioned2018-09-18T06:38:57Z-
dc.date.available2018-09-18T06:38:57Z-
dc.date.created2018-07-27-
dc.date.created2018-07-27-
dc.date.created2018-07-27-
dc.date.created2018-07-27-
dc.date.issued2018-07-
dc.identifier.citationAPPLIED SCIENCES, v.8, no.7-
dc.identifier.issn2076-3417-
dc.identifier.urihttp://hdl.handle.net/10203/245701-
dc.description.abstractIn this paper, we present a study of various ZnO/SiO2-stacked thin film structures for flexible micro-energy harvesting devices. Two groups of micro-energy harvesting devices, SiO2/ZnO/SiO2 micro-energy generators (SZS-MGs) and ZnO/SiO2/ZnO micro-energy generators (ZSZ-MGs), were fabricated by stacking both SiO2 and ZnO thin films, and the resulting devices were characterized. With a particular interest in the fabrication of flexible devices, all the ZnO and SiO2 thin films were deposited on indium tin oxide (ITO)-coated polyethylene naphthalate (PEN) substrates using a radio frequency (RF) magnetron sputtering technique. The effects of the thickness and/or position of the SiO2 films on the device performance were investigated by observing the variations of output voltage in comparison with that of a control sample. As a result, compared to the ZnO single-layer device, all the ZSZ-MGs showed much better output voltages, while all the SZS-MG showed only slightly better output voltages. Among the ZSZ-MGs, the highest output voltages were obtained from the ZSZ-MGs where the SiO2 thin films were deposited using a deposition power of 150W. Overall, the device performance seems to depend significantly on the position as well as the thickness of the SiO2 thin films in the ZnO/SiO2-stacked multilayer structures, in addition to the processing conditions.-
dc.languageEnglish-
dc.publisherMDPI-
dc.subjectTRIBOELECTRIC NANOGENERATORS-
dc.subjectVIBRATION-
dc.titleFormation and Characterization of Various ZnO/SiO2-Stacked Layers for Flexible Micro-Energy Harvesting Devices-
dc.typeArticle-
dc.identifier.wosid000441814300117-
dc.identifier.scopusid2-s2.0-85049909912-
dc.type.rimsART-
dc.citation.volume8-
dc.citation.issue7-
dc.citation.publicationnameAPPLIED SCIENCES-
dc.identifier.doi10.3390/app8071127-
dc.contributor.localauthorYoon, Giwan-
dc.description.isOpenAccessY-
dc.type.journalArticleArticle-
dc.subject.keywordAuthorsilicon dioxide-
dc.subject.keywordAuthorpiezoelectric device-
dc.subject.keywordAuthorzinc oxide-
dc.subject.keywordAuthorRF sputtering deposition-
dc.subject.keywordAuthorsilicon dioxide-
dc.subject.keywordAuthorpiezoelectric device-
dc.subject.keywordAuthorzinc oxide-
dc.subject.keywordAuthorRF sputtering deposition-
dc.subject.keywordPlusTRIBOELECTRIC NANOGENERATORS-
dc.subject.keywordPlusVIBRATION-
dc.subject.keywordPlusTRIBOELECTRIC NANOGENERATORS-
dc.subject.keywordPlusVIBRATION-
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