Phase change and cooling characteristics of microjets measured using microcantilever heaters

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This paper reports novel microcantilever metrology tools to investigate free microjets emanating from a micromachined nozzle of diameter 10 mu m. Microcantilevers with an integrated resistive heater-thermometer were used to study microjet cooling and phase change characteristics. While the microcantilever heater was aligned to and impinged upon by hydrocarbon microjets, the heater temperature was modulated by a constant voltage source. Successive heating and cooling cycles captured the microjet phase change hysteresis properties. When the microcantilever heater temperature was controlled, it was possible to construct a full boiling curve. Measurements were made on microjets of butane, hexane, and octane. The convective heat fluxes accompanied by microjet impingement boiling were 2.9-7.6 kW/cm(2) for heater temperatures of 25-350 degrees C. Overall, the techniques reported herein show promise for characterizing microscale jet flows. (C) 2008 Elsevier B.V. All rights reserved.
Publisher
ELSEVIER SCIENCE SA
Issue Date
2008-09
Language
English
Article Type
Article
Keywords

PULSED LIQUID MICROJET; BUBBLE NUCLEATION; JET IMPINGEMENT; SURFACE

Citation

SENSORS AND ACTUATORS A-PHYSICAL, v.147, no.1, pp.64 - 69

ISSN
0924-4247
DOI
10.1016/j.sna.2008.03.022
URI
http://hdl.handle.net/10203/245489
Appears in Collection
ME-Journal Papers(저널논문)
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