정전기력으로 구동되는 마이크로 캔틸레버 질량 센서의 제작과 특성

Abstract

Microcantilevers have been actively used in probe-based microscopy and gravimetric sensing for biological or chemical analytes. To integrate actuation or detection schemes in the structure, typical fabrication processes include several photolithographic steps along with conventional MEMS fabrication. In this paper, a simple and straightforward way to fabricate and operate silicon microcantilever mass sensors is presented. The fabricated microcantilever sensors which can be electrostatically actuated require only two photolithographic steps. Resonant characteristics of fabricated microcantilevers are measured with a custom optical-lever and results show size-dependent quality factors. Using a 40 μm long, 7 μm wide, and 3 μm thick cantilever, we achieved subfemtogram mass resolution in a 1 Hz bandwidth.