large scale optical nanostructures using ultrathin silver film = 은 초박막을 이용한 대면적 나노광학구조

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Optical nanostructures have been actively applied to diverse nanodevices for nanoscale imaging and lithography, illumination system with high efficiency, ultrathin display system with high resolution, and bio-sensing with high efficiency due to their unique abilities such as antireflection, negative index, and plasmonic resonance. However, the lack of scalable nanofabrication method with a low cost disturbs the practical and common uses of optical nanostructures. This study presents diverse optical nanostructures on a large area by using ultrathin silver film. First, large scale silver nanoholes and nanoislands were studied based on the solid-state dewetting and oblique angle deposition. Next, the glass nanohole arrays was developed for mechanically stable antireflective structures based on silver nanoholes. At last, the optically patternable metamaterial was developed to overcome the diffraction limit based on the surface plasmon excitation, i.e., the superlens effect. Ultraviolet nanolithography was demonstrated by using the optically patternable metamaterial and a conventional photolithography system. The large scale optical nanostructures such as antireflective structures and optically patternable metamaterials based on ultrathin silver film will provide practical applications of nanodevices including nanolithography/imaging, high efficient illumination/imaging lens, plasmonic spectral filter, and bio-sensing with high efficiency.
Advisors
Jeong, Ki Hunresearcher정기훈researcher
Description
한국과학기술원 :바이오및뇌공학과,
Publisher
한국과학기술원
Issue Date
2017
Identifier
325007
Language
eng
Description

학위논문(박사) - 한국과학기술원 : 바이오및뇌공학과, 2017.8,[xiii, 150 p. :]

Keywords

large area nanostructure▼aultrathin metal film▼ametamaterial▼aUV nanolithography▼aantireflective structure; 대면적 나노구조▼a금속 초박막▼a메타물질▼a자외선 나노리소그래피▼a무반사 구조

URI
http://hdl.handle.net/10203/241810
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=718826&flag=dissertation
Appears in Collection
BiS-Theses_Ph.D.(박사논문)
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