3D profiling of rough silicon carbide surfaces by coherence scanning interferometry using a femtosecond laser

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dc.contributor.authorLu, Yangko
dc.contributor.authorPark, Jiyongko
dc.contributor.authorYu, Liandongko
dc.contributor.authorKim, Seung-Wooko
dc.date.accessioned2018-05-23T06:29:13Z-
dc.date.available2018-05-23T06:29:13Z-
dc.date.created2018-04-23-
dc.date.created2018-04-23-
dc.date.created2018-04-23-
dc.date.issued2018-03-
dc.identifier.citationAPPLIED OPTICS, v.57, no.10, pp.2584 - 2589-
dc.identifier.issn1559-128X-
dc.identifier.urihttp://hdl.handle.net/10203/241506-
dc.description.abstractWe test an erbium-doped fiber femtosecond laser for its potential as a light source for a coherence scanning interferometer for large field-of-view profiling of rough silicon carbide (SiC) surfaces. This infrared fiber pulse laser is able to provide a relatively long temporal coherence length of similar to 30 mu m to be appropriate for coherence scanning of rough surfaces. At the same time, it offers a high degree of spatial coherence comparable to that of a monochromatic continuous wave laser to achieve a large measurement field of view. In addition, the highly maintained linear polarization of the pulse laser source permits overcoming the low specular reflectance of rough SiC surfaces by polarization-based optical power splitting control between the reference and measurement arms. (c) 2018 Optical Society of America-
dc.languageEnglish-
dc.publisherOPTICAL SOC AMER-
dc.title3D profiling of rough silicon carbide surfaces by coherence scanning interferometry using a femtosecond laser-
dc.typeArticle-
dc.identifier.wosid000428998400047-
dc.identifier.scopusid2-s2.0-85044817510-
dc.type.rimsART-
dc.citation.volume57-
dc.citation.issue10-
dc.citation.beginningpage2584-
dc.citation.endingpage2589-
dc.citation.publicationnameAPPLIED OPTICS-
dc.identifier.doi10.1364/AO.57.002584-
dc.contributor.localauthorKim, Seung-Woo-
dc.contributor.nonIdAuthorLu, Yang-
dc.contributor.nonIdAuthorYu, Liandong-
dc.description.isOpenAccessN-
dc.type.journalArticleArticle-
dc.subject.keywordPlusPHASE-SHIFTING INTERFEROMETRY-
dc.subject.keywordPlusSPATIAL COHERENCE-
dc.subject.keywordPlusREPETITION RATE-
dc.subject.keywordPlusPULSES-
dc.subject.keywordPlusLIGHT-
dc.subject.keywordPlusPROFILOMETRY-
dc.subject.keywordPlusMIRROR-
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