The Influence of the Acoustic Reflector Design on the Temperature Coefficient of Frequency for Shear and Longitudinal Mode AlN Resonators

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Most of the applications of solidly mounted resonator need the compensation of temperature coefficient of resonant frequency. The presence of materials with different properties in the stack makes it complicated to explain the influence of each material individually on temperature coefficient. To reduce design and fabrication costs, an accurate and precise modeling of the resonators is required. In this paper, Mason model and finite-element analysis are used to design the resonators and results for both models, which are almost similar, are presented. Different kinds of configuration (symmetric and asymmetric, according to the thickness of the layers) are designed to achieve the temperature coefficient of frequency as near-zero as possible with an optimized response. Such designs are fabricated and characterized obtaining measurements of the temperature coefficient of frequency. The result shows that useful and reliable information on the performance of resonators can be achieved with accurate modeling.
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Issue Date
2017-12
Language
English
Article Type
Article
Keywords

SOLIDLY MOUNTED RESONATOR; BAW RESONATORS; DEVICES; FILMS

Citation

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.26, no.6, pp.1306 - 1315

ISSN
1057-7157
DOI
10.1109/JMEMS.2017.2737641
URI
http://hdl.handle.net/10203/238812
Appears in Collection
EE-Journal Papers(저널논문)
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