DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Sang Wan | ko |
dc.contributor.author | Song, Jae Young | ko |
dc.contributor.author | Kim, Jong Pil | ko |
dc.contributor.author | Choi, Woo Young | ko |
dc.contributor.author | Chung, Han Ki | ko |
dc.contributor.author | Park, Jae Hyun | ko |
dc.contributor.author | Ko, Hyungsoo | ko |
dc.contributor.author | Park, Hongsik | ko |
dc.contributor.author | Park, Chulmin | ko |
dc.contributor.author | Hong, Seungbum | ko |
dc.contributor.author | Choa, Sung-Hoon | ko |
dc.contributor.author | Lee, Jong Duk | ko |
dc.contributor.author | Shin, Hyungcheol | ko |
dc.contributor.author | Park, Byung-Gook | ko |
dc.date.accessioned | 2018-01-30T02:31:44Z | - |
dc.date.available | 2018-01-30T02:31:44Z | - |
dc.date.created | 2017-12-29 | - |
dc.date.issued | 2008-06 | - |
dc.identifier.citation | IEEE 2008 Silicon Nanoelectronics Workshop, SNW 2008 | - |
dc.identifier.uri | http://hdl.handle.net/10203/238146 | - |
dc.description.abstract | Novel fabrication methods are investigated to enhance the sensitivity of resistive probes. In this paper, two new silicon resistive probes are presented by using two-dimensional device simulation (SILVACO™). Enhancement probe and 1-MOS probe are formed by using anisotropic etch and mask transcription process. Due to novel structures, the sensitivity of resistive probes is increased dramatically. | - |
dc.language | English | - |
dc.publisher | IEEE | - |
dc.title | Investigation of resistive probes with high sensitivity | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.publicationname | IEEE 2008 Silicon Nanoelectronics Workshop, SNW 2008 | - |
dc.identifier.conferencecountry | US | - |
dc.identifier.conferencelocation | Honolulu, Hawaii | - |
dc.identifier.doi | 10.1109/SNW.2008.5418407 | - |
dc.contributor.localauthor | Hong, Seungbum | - |
dc.contributor.nonIdAuthor | Kim, Sang Wan | - |
dc.contributor.nonIdAuthor | Song, Jae Young | - |
dc.contributor.nonIdAuthor | Kim, Jong Pil | - |
dc.contributor.nonIdAuthor | Choi, Woo Young | - |
dc.contributor.nonIdAuthor | Chung, Han Ki | - |
dc.contributor.nonIdAuthor | Park, Jae Hyun | - |
dc.contributor.nonIdAuthor | Ko, Hyungsoo | - |
dc.contributor.nonIdAuthor | Park, Hongsik | - |
dc.contributor.nonIdAuthor | Park, Chulmin | - |
dc.contributor.nonIdAuthor | Choa, Sung-Hoon | - |
dc.contributor.nonIdAuthor | Lee, Jong Duk | - |
dc.contributor.nonIdAuthor | Shin, Hyungcheol | - |
dc.contributor.nonIdAuthor | Park, Byung-Gook | - |
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