Showing results 1 to 1 of 1
COMPOSITIONAL AND STRUCTURAL-ANALYSIS OF ALUMINUM-OXIDE FILMS PREPARED BY PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION KIM, YC; PARK, HH; Chun , Soung Soon; Lee, Won-Jong, THIN SOLID FILMS, v.237, no.1-2, pp.57 - 65, 1994-01 |
Discover