Nickel oxide film for bolometer and method for manufacturing thereof, and infrared detector using the same
There are provided a nickel oxide film for a bolometer and a manufacturing method thereof, and an infrared detector using the nickel oxide film. The nickel oxide film has properties with a TCR value greater than −3%/° C., a low noise value, and stable and high reproducibility properties. The nickel oxide film is applicable to manufacturing an infrared detector using a nickel oxide film for a bolomet
- Assignee
- KAIST
- Country
- US (United States)
- Issue Date
- 2012-05-08
- Application Date
- 2009-10-29
- Application Number
- 12608657
- Registration Date
- 2012-05-08
- Registration Number
- 08173280
- Appears in Collection
- EE-Patent(특허)
- Files in This Item
- There are no files associated with this item.
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