Block copolymer nanostructure formed on surface pattern with shape different from nanostructure of the block copolymer and method for preparation thereof블록공중합체의 나노구조와 일치하지 않는 형태의 표면패턴상에 형성되는 블록공중합체의 나노구조체 및 그 제조방법

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Disclosed are block copolymer nanostructures formed on surface patterns different from nanostructure of the block copolymer and preparation methods thereof.
Assignee
KAIST
Country
US (United States)
Issue Date
2015-04-14
Application Date
2008-04-11
Application Number
12081172
Registration Date
2015-04-14
Registration Number
9,005,756
URI
http://hdl.handle.net/10203/233050
Appears in Collection
MS-Patent(특허)
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