Batch fabrication method of three-dimensional photonic microstructures대면적 3차원 광학 구조의 제조 방법
Provided is a batch fabrication method of three-dimensional photonic microstructures including a support structure fabricating step, a variable structure fabricating step, a thermal reflow step, and a three-dimensional photonic microstructure forming step. The batch fabrication method of three-dimensional photonic microstructures fabricates three-dimensional photonic microstructures having several shapes depending on a demand of a user through these steps.
- Assignee
- KAIST
- Country
- US (United States)
- Issue Date
- 2016-10-04
- Application Date
- 2015-03-02
- Application Number
- 14635186
- Registration Date
- 2016-10-04
- Registration Number
- 9459381
- Appears in Collection
- BiS-Patent(특허)
- Files in This Item
- There are no files associated with this item.
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