Multi-electrode에서의 원활한 gas공급을 위한 shower head 및 절연체의 구조제안

Abstract

Disclose a kind of plasma producing apparatus i.e. substrate board treatment.Described plasma producing apparatus includes: be arranged on multiple earth electrodes that vacuum tank is internal and extends parallel to one another；And the power electrode being arranged between earth electrode.There are the region of constant distance between earth electrode and power electrode, power electrode is being tapered on the direction of substrate.Power electrode is connected to RF power source, and on the direction of substrate, the height of power electrode is more than the height of earth electrode.