Tailoring of the coercive voltage in a ferroelectric polymer capacitor

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For an identical ferroelectric material, operation at a different voltage means that all ferroelectric films should be designed for different thicknesses, though this increases the degree of process complexity. Here, a technique which can be used to adjust the coercive voltage (V-c) of a metal-ferroelectric film-metal capacitor is demonstrated. The V-c-adjustable capacitor was fabricated with ferroelectric polymer film and the capacitor consists of two sub-capacitors with different thicknesses. For a common top and bottom electrode, the sub-capacitors are equivalent to two parallel-connected capacitors. With regard to the variance of the ratio of the area of the sub-capacitors, a V-c-adjustable capacitor can take coercive voltage between two V-c values, each of which correspond to the V-c value of each respective sub-capacitor. In this demonstration, the width of the tuning range of the V-c values was 3.6 V. In addition, the strategy for a linear V-c adjustment of a V-c-adjustable capacitor is discussed in terms of the concept of nonlinearity. This demonstration with a ferroelectric polymer is predicted to be applicable to emerging organic electronic applications. (C) 2016 Elsevier B.V. All rights reserved
Publisher
ELSEVIER SCIENCE BV
Issue Date
2016-12
Language
English
Article Type
Article
Keywords

COPOLYMER; FATIGUE; DEVICE; FILMS

Citation

MICROELECTRONIC ENGINEERING, v.166, pp.19 - 25

ISSN
0167-9317
DOI
10.1016/j.mee.2016.09.009
URI
http://hdl.handle.net/10203/214811
Appears in Collection
EE-Journal Papers(저널논문)
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