Slow scanning electromagnetic scanner for laser display

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A small sized, low power consuming, shock proven optical scanner with a capacitive comb-type rotational sensor for the application of mobile projection display is designed, fabricated, and characterized. To get a 2-D video image, the present device horizontally scans a vertical line image made through a line-type diffractive spatial optical modulator. To minimize, device size as well as power consumption, the mirror surface is placed on the opposite side of the coil actuator. To prevent thermal deformation of the mirror, the mirror is partially connected to the center point of the coil actuator. To be shock proof, mechanical stoppers are constructed in the device. The scanner is fabricated from two silicon wafers and one glass wafer using bulk micromachining technology. The packaged scanner consists of the scanner chip, a pair of magnets, yoke rim, and base plate. The fabricated package size is 9.2x10x3 mm (0.28 cc) and the mirror size is 3 x 1.5 mm. The scanner chip receives no damage under the shock test with an impact of 2000 G in 1 ms. In the case of a full optical scan angle of 30 deg at 120-Hz driving frequency, linearity, repeatability, and power consumption are measured at 98%, 0.013 deg, and 60 mW, respectively, which are suitable for mobile display applications. (C) 2008 Society of Photo-Optical Instrumentation Engineers. [DOI: 10.1117/1.3033210
Publisher
SPIE-SOC PHOTOPTICAL INSTRUMENTATION ENGINEERS
Issue Date
2008-10
Language
English
Article Type
Article
Citation

JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, v.7, no.4

ISSN
1537-1646
DOI
10.1117/1.3033210
URI
http://hdl.handle.net/10203/212751
Appears in Collection
ME-Journal Papers(저널논문)
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