Electrothermal MEMS parallel plate rotation for single-imager stereoscopic endoscopes

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This work reports electrothermal MEMS parallel plate-rotation (PPR) for a single-imager based stereoscopic endoscope. A thin optical plate was directly connected to an electrothermal MEMS microactuator with bimorph structures of thin silicon and aluminum layers. The fabricated MEMS PPR device precisely rotates an transparent optical plate up to 37 degrees prior to an endoscopic camera and creates the binocular disparities, comparable to those from binocular cameras with a baseline distance over 100 mu m. The anaglyph 3D images and disparity maps were successfully achieved by extracting the local binocular disparities from two optical images captured at the relative positions. The physical volume of MEMS PPR is well fit in 3.4 mm x 3.3 mm x 1 mm. This method provides a new direction for compact stereoscopic 3D endoscopic imaging systems. (C) 2016 Optical Society of Americ
Publisher
OPTICAL SOC AMER
Issue Date
2016-05
Language
English
Article Type
Article
Citation

OPTICS EXPRESS, v.24, no.9, pp.9667 - 9672

ISSN
1094-4087
DOI
10.1364/OE.24.009667
URI
http://hdl.handle.net/10203/210018
Appears in Collection
CS-Journal Papers(저널논문)BiS-Journal Papers(저널논문)
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