이중 스테이지를 이용한 대면적 3차원 광/유체 마이크로 디바이스 제작에 관한 연구Fabrication of Three-Dimensional Micro Optical and Fluidic System Using Dual Stage Nanostereolithography Process

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The nanostereolithography process using a femtosecond laser has been shown to have strong merits for the direct fabrication of 2D/3D micro structures. In addition, a femtosecond laser provides efficient tools for precise micromachining owing to the advantages of a small and feeble heat effect zone. In this paper, we report an effective fabrication process of 3D micro optical and fluidic devices using nanostereolithography process composed of a dual stage system. Process conditions for additive and subtractive fabrication are examined. The Piezo stage scanning system is used for 3D micro-fabrication in unit area of sub-mm scale, and the motor stage is employed in fabrication on the scale of several mm. The misalignment between the pizeo- and motor- stages is revised through rotational transformation of CAD data in the unit domain. Here, the effectiveness of the proposed process is demonstrated through examples using 3D optical and microfluidic structures.
Publisher
대한설비공학회
Issue Date
2015-10
Language
Korean
Citation

설비공학 논문집, v.27, no.10, pp.552 - 557

ISSN
1229-6422
DOI
10.6110/KJACR.2015.27.10.552
URI
http://hdl.handle.net/10203/208855
Appears in Collection
ME-Journal Papers(저널논문)
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