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Results 1-2 of 2 (Search time: 0.004 seconds).

NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
Deposition Characteristics of TiCN Deposited by Plasma Enhanced Chemical Vapor Deposition

Chun , Soung Soon, Proc. 7th Int'l Conf. on Ion & Plasma Assisted Techniques, pp.254, International Conference on Ion and Plasma Assisted Techniques, 1989-05

2
LPCVD of Blanket W Using A Gaseous Mixture of WF6, SiH4 and H2

Chun , Soung Soon, Proc. 16th Int'l Conf. on metallurgical Coatings, International Conference on Metallurgical Coatings, 1989-04

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