Browse "RIMS Conference Papers" by Author Han, Chul-Hi
Showing results 9 to 10 of 10
| Planarization and trench filling on severe surface topography with thick photoresist for MEMS Yoon, Jun-Bo; Oh, G.Y.; Han, Chul-Hi; Yoon, Euisik; Kim, Choong Ki, the SPIE symposium on Micromachining and Microfabrication: Materials and Device Characterization in micromachining, pp.297 - 306, SPIE, 1998-09-21 |
| Uniform and Simultaneous Fabrication of High-Precision and High-Density Nozzles, Channels, and Cavities for Inkjet Printheads Yoon, Jun-Bo; Kim, Choong Ki; Yoon, Euisik; Han, Chul-Hi, Proceedings of the SPIE symposium on Micromachining and Microfabrication: Materials and Device Characterization in micromachining, v.3511, pp.214 - 224, 1998-09 |
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