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A highly-sensitive differential-mode microchemical sensor using tfbars with on-chip microheater for Volatile Organic Compound (VOC) detection

Lee H.-M.; Kim H.-T.; Choi H.-K.; Lee H.-C.; Hong H.-K.; Lee D.-H.; Bu J.-U.; et al, 19th IEEE International Conference on Micro Electro Mechanical Systems, pp.490 - 493, 2006-01-22

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