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Etching properties of aluminum oxide films prepared by plasma enhanced metal organic chemical vapor deposition : High Performance Ceramic Films and Coatings

Lee, Won-Jong; Park, Chong-Ook; Chun, Soung Soon; Kang, CJ; Kim, YC, 7th CIMTEC--World Ceramics Congress, pp.391 - 398, CIMTEC--World Ceramics Congress, 1990-06

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