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Dispersive white-light interferometrt for thin-film thickness profile measurement Kim, Seung-Woo; Y.S.Ghim, SPIE, pp.419 - 426, 2005 |
Dispersive white-light interferometry for 3-D inspection of thin-film layers of flat panel displays Kim, Seung-Woo; Y.S.Ghim; J.You, Proc.of SPIE, pp.6616 -, 2007 |
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