Browse "School of Electrical Engineering(전기및전자공학부)" by Subject ION-IMPLANTED SILICON

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Boron profile narrowing in laser-processed silicon after rapid thermal anneal

Poon, CH; Tan, LS; Cho, Byung Jin; See, A; Bhat, M, JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.151, no.1, pp.80 - 83, 2004-01

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