Browse "School of Electrical Engineering(전기및전자공학부)" by Subject polyimide sacrificial layer
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| TiN/PECVD-Si3N4/TiN diaphragm-based capacitive-type MEMS acoustic sensor Lee, Jae Woo; Jeon, J. H.; Kim, Y. G.; Lee, S. Q.; Yang, W. S.; Lee, Jungsoo; Lee, Sang-Gug, ELECTRONICS LETTERS, v.52, no.6, pp.468 - 469, 2016-03 |
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