Browse "School of Electrical Engineering(전기및전자공학부)" bySubjectRADIATION-DAMAGE

Showing results 2 to 3 of 3

2
Electron beam damage in the SiN membrane of an X-ray lithography mask

Choi, Sang-Soo; Kim, Jong Soo; Chung, Hai Bin; Yoo, Hyung Jounresearcher; Kim, Bo-Woo, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.37, no.1, pp.360 - 363, 1998-01

3
Reliability of thin gate oxides irradiated under X-ray lithography conditions

Cho, Byung Jinresearcher; Kim, SJ; Ang, CH; Ling, CH; Joo, MS; Yeo, IS, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.40, no.4B, pp.2819 - 2822, 2001-04

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