Browse "School of Electrical Engineering(전기및전자공학부)" bySubjectsacrificial oxide

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Characterization of anhydrous HF gas-phase etching with CH3OH for sacrificial oxide removal

Lee, JH; Jang, WI; Lee, CS; Il Lee, Y; Choi, CA; Baek, JT; Yoo, Hyung Jounresearcher, SENSORS AND ACTUATORS A-PHYSICAL, v.64, no.1, pp.27 - 32, 1998-01

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